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00790cam a2200181 a 4500 |
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20200810152604.0 |
| 008 |
880802s1989 maua b 001 0 eng |
| 082 |
0 |
0 |
|a 621.36/6
|b EHR
|
| 245 |
0 |
0 |
|a Laser microfabrication :
|b thin film processes and lithography /
|c edited by Daniel J. Ehrlich, Jeffrey Y. Tsao.
|
| 300 |
|
|
|a xii, 587 p. :
|b ill. ;
|c 24 cm.
|
| 653 |
|
|
|a Lasers--Industrial applications.
|a Thin film devices--Design and construction.
|a Microlithography.
|a Microlithography.
|
| 700 |
1 |
|
|a Ehrlich, Daniel J., ed.
|9 4475
|
| 700 |
1 |
|
|a Tsao, Jeffrey Y., ed.
|9 4476
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a Boston :
|b Academic Press,
|c c1989.
|
| 020 |
|
|
|a 0122334302
|
| 999 |
|
|
|c 212510
|d 212510
|
| 952 |
|
|
|0 0
|1 0
|2 ddc
|4 0
|6 621366_EHR
|7 0
|9 270879
|a PHY
|b PHY
|d 2010-02-19
|o 621.36/6 EHR
|p PHY011356
|r 2010-02-19
|w 2010-02-19
|y BK
|