Laser microfabrication : thin film processes and lithography /

书目详细资料
其他作者: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
格式: Printed Book
语言:English
出版: Boston : Academic Press, c1989.
主题:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.
实物特征
实物描述:xii, 587 p. : ill. ; 24 cm.
ISBN:0122334302

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