Laser microfabrication : thin film processes and lithography /

Bibliografski detalji
Daljnji autori: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Format: Printed Book
Jezik:English
Izdano: Boston : Academic Press, c1989.
Teme:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.
Opis
Opis:xii, 587 p. : ill. ; 24 cm.
ISBN:0122334302

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