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Laser microfabrication : thin film processes and lithography /
| Andre forfattere: | , |
|---|---|
| Format: | Printed Book |
| Sprog: | English |
| Udgivet: |
Boston :
Academic Press,
c1989.
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| Fag: |
| Fysisk beskrivelse: | xii, 587 p. : ill. ; 24 cm. |
|---|---|
| ISBN: | 0122334302 |