Laser microfabrication : thin film processes and lithography /

Manylion Llyfryddiaeth
Awduron Eraill: Ehrlich, Daniel J., ed, Tsao, Jeffrey Y., ed
Fformat: Printed Book
Iaith:English
Cyhoeddwyd: Boston : Academic Press, c1989.
Pynciau:
Lasers--Industrial applications. > Thin film devices--Design and construction. > Microlithography. > Microlithography.
Disgrifiad
Disgrifiad Corfforoll:xii, 587 p. : ill. ; 24 cm.
ISBN:0122334302

Eitemau Tebyg