APA Edition Citation

Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.

Chicago Edition Citation

Ehrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Boston: Academic Press, 1989.

MLA Edition Citation

Ehrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.