Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.
Dyfyniad Arddull ChicagoEhrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Boston: Academic Press, 1989.
Dyfyniad MLAEhrlich, Daniel J., and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.
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