Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.
Chicago Edition CitationEhrlich, Daniel J., i Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Boston: Academic Press, 1989.
Cita MLAEhrlich, Daniel J., i Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.
Atenció: Aquestes cites poden no estar 100% correctes.