Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

Bibliografiske detaljer
Institution som forfatter: United States. Air Force. Office of Scientific Research
Andre forfattere: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
Format: Printed Book
Sprog:English
Udgivet: New York : North-Holland, c1983.
Serier:Material research society symposia proceedings; v. 17
Fag:
Lasers--Industrial applications--Congresses. > Semiconductors--Congresses.

PHY

Detaljer om beholdninger fra PHY
Klassifikationsnummer: 621.3815/2 OSG
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