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01127pam a2200229 a 4500 |
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20200810152545.0 |
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830408s1983 nyua b 101 0 eng |
| 082 |
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|a 621.3815/2
|b OSG
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| 245 |
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|a Laser diagnostics and photochemical processing for semiconductor devices :
|b symposium held November 1982 in Boston, Massachusetts, U.S.A. /
|c editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
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| 300 |
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|a xiii, 298 p. :
|b ill. ;
|c 24 cm.
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| 490 |
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|a Material research society symposia proceedings;
|v v. 17
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| 653 |
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|a Lasers--Industrial applications--Congresses.
|a Semiconductors--Congresses.
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| 700 |
1 |
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|a Osgood, R. M., ed.
|9 4381
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| 700 |
1 |
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|a Brueck, S. R. J., ed.
|9 4382
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| 700 |
1 |
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|a Schlossberg, H. R., ed.
|9 4383
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| 710 |
1 |
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|a United States.
|b Air Force.
|b Office of Scientific Research.
|9 4384
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| 942 |
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|c BK
|6 _
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| 260 |
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|a New York :
|b North-Holland,
|c c1983.
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| 500 |
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|a "Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
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| 020 |
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|a 0444007822
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| 999 |
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|c 212459
|d 212459
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| 952 |
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|1 0
|2 ddc
|4 0
|6 62138152_OSG
|7 0
|9 270817
|a PHY
|b PHY
|d 2010-02-18
|o 621.3815/2 OSG
|p PHY007661
|r 2010-02-18
|w 2010-02-18
|y BK
|