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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

书目详细资料
企业作者: United States. Air Force. Office of Scientific Research
其他作者: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
格式: Printed Book
语言:English
出版: New York : North-Holland, c1983.
丛编:Material research society symposia proceedings; v. 17
主题:
实物特征
Item Description:"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
实物描述:xiii, 298 p. : ill. ; 24 cm.
ISBN:0444007822