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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /
| 企業作者: | |
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| 其他作者: | , , |
| 格式: | Printed Book |
| 語言: | English |
| 出版: |
New York :
North-Holland,
c1983.
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| 叢編: | Material research society symposia proceedings;
v. 17 |
| 主題: |
| Item Description: | "Sponsored by the Air Force Office of Scientific Research"--T.p. verso. |
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| 實物描述: | xiii, 298 p. : ill. ; 24 cm. |
| ISBN: | 0444007822 |