Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

Bibliografiska uppgifter
Institutionell upphovsman: United States. Air Force. Office of Scientific Research
Övriga upphovsmän: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
Materialtyp: Printed Book
Språk:English
Publicerad: New York : North-Holland, c1983.
Serie:Material research society symposia proceedings; v. 17
Ämnen:
Lasers--Industrial applications--Congresses. > Semiconductors--Congresses.
Beskrivning
Beskrivning:"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Fysisk beskrivning:xiii, 298 p. : ill. ; 24 cm.
ISBN:0444007822

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