Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

Detalles Bibliográficos
Autor Corporativo: United States. Air Force. Office of Scientific Research
Outros autores: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
Formato: Printed Book
Idioma:English
Publicado: New York : North-Holland, c1983.
Series:Material research society symposia proceedings; v. 17
Subjects:
Lasers--Industrial applications--Congresses. > Semiconductors--Congresses.
Descripción
descrición da copia:"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Descrición Física:xiii, 298 p. : ill. ; 24 cm.
ISBN:0444007822

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