Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

Détails bibliographiques
Collectivité auteur: United States. Air Force. Office of Scientific Research
Autres auteurs: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
Format: Printed Book
Langue:English
Publié: New York : North-Holland, c1983.
Collection:Material research society symposia proceedings; v. 17
Sujets:
Lasers--Industrial applications--Congresses. > Semiconductors--Congresses.
Description
Description:"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Description matérielle:xiii, 298 p. : ill. ; 24 cm.
ISBN:0444007822

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