Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /

Xehetasun bibliografikoak
Erakunde egilea: United States. Air Force. Office of Scientific Research
Beste egile batzuk: Osgood, R. M., ed, Brueck, S. R. J., ed, Schlossberg, H. R., ed
Formatua: Printed Book
Hizkuntza:English
Argitaratua: New York : North-Holland, c1983.
Saila:Material research society symposia proceedings; v. 17
Gaiak:
Lasers--Industrial applications--Congresses. > Semiconductors--Congresses.
Deskribapena
Alearen deskribapena:"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
Deskribapen fisikoa:xiii, 298 p. : ill. ; 24 cm.
ISBN:0444007822

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