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Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. /
| Institution som forfatter: | |
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| Andre forfattere: | , , |
| Format: | Printed Book |
| Sprog: | English |
| Udgivet: |
New York :
North-Holland,
c1983.
|
| Serier: | Material research society symposia proceedings;
v. 17 |
| Fag: |
| Emne beskrivelse: | "Sponsored by the Air Force Office of Scientific Research"--T.p. verso. |
|---|---|
| Fysisk beskrivelse: | xiii, 298 p. : ill. ; 24 cm. |
| ISBN: | 0444007822 |