APA Edition Citation

United States. Air Force. Office of Scientific Research, Osgood, R. M., Brueck, S. R. J., & Schlossberg, H. R. (1983). Laser diagnostics and photochemical processing for semiconductor devices: Symposium held November 1982 in Boston, Massachusetts, U.S.A. North-Holland.

Chicago Edition Citation

United States. Air Force. Office of Scientific Research, R. M. Osgood, S. R. J. Brueck, and H. R. Schlossberg. Laser Diagnostics and Photochemical Processing for Semiconductor Devices: Symposium Held November 1982 in Boston, Massachusetts, U.S.A. New York: North-Holland, 1983.

MLA Edition Citation

United States. Air Force. Office of Scientific Research, et al. Laser Diagnostics and Photochemical Processing for Semiconductor Devices: Symposium Held November 1982 in Boston, Massachusetts, U.S.A. North-Holland, 1983.