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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| 主要作者: | |
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| 格式: | Printed Book |
| 語言: | English |
| 出版: |
Berlin ;
Springer-Verlag,
c1987.
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| 叢編: | Springer series in materials science ;
v. 3. |
| 主題: |
PHY
| 索引號: |
621.36/6 BOY |
|---|---|
| 復印件 | Live Status Unavailable |