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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Autor principal: | |
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| Formato: | Printed Book |
| Lenguaje: | English |
| Publicado: |
Berlin ;
Springer-Verlag,
c1987.
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| Colección: | Springer series in materials science ;
v. 3. |
| Materias: |
PHY
| Número de Clasificación: |
621.36/6 BOY |
|---|---|
| Copia | Estatus de actividad no disponible |