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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
Hovedforfatter: | |
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Format: | Printed Book |
Sprog: | English |
Udgivet: |
Berlin ;
Springer-Verlag,
c1987.
|
Serier: | Springer series in materials science ;
v. 3. |
Fag: |
PHY
Klassifikationsnummer: |
621.36/6 BOY |
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Kopi | Live Status Unavailable |