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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Hoofdauteur: | |
|---|---|
| Formaat: | Printed Book |
| Taal: | English |
| Gepubliceerd in: |
Berlin ;
Springer-Verlag,
c1987.
|
| Reeks: | Springer series in materials science ;
v. 3. |
| Onderwerpen: |