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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Auteur principal: | Boyd, Ian W. |
|---|---|
| Format: | Printed Book |
| Langue: | English |
| Publié: |
Berlin ;
Springer-Verlag,
c1987.
|
| Collection: | Springer series in materials science ;
v. 3. |
| Sujets: |
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