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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
Berlin ;
Springer-Verlag,
c1987.
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| Series: | Springer series in materials science ;
v. 3. |
| Subjects: |
PHY
| Call Number: |
621.36/6 BOY |
|---|---|
| Copy | Live Status Unavailable |