|
|
|
|
| LEADER |
00792cam a2200193 a 4500 |
| 005 |
20200810151829.0 |
| 008 |
870723s1987 wb a b 001 0 eng |
| 082 |
0 |
0 |
|a 621.36/6
|b BOY
|
| 100 |
1 |
|
|a Boyd, Ian W.,
|9 3078
|
| 245 |
1 |
0 |
|a Laser processing of thin films and microstructures :
|b oxidation, deposition, and etching of insulators /
|c Ian W. Boyd.
|
| 300 |
|
|
|a viii, 320 p. :
|b 77 ill. ;
|c 24 cm.
|
| 490 |
1 |
|
|a Springer series in materials science ;
|v 3
|
| 653 |
|
|
|a Lasers--Industrial applications
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a Berlin ;
|b Springer-Verlag,
|c c1987.
|
| 020 |
|
|
|a 0387179518
|
| 830 |
|
0 |
|a Springer series in materials science ;
|v v. 3.
|9 3077
|
| 999 |
|
|
|c 211564
|d 211564
|
| 952 |
|
|
|0 0
|1 0
|2 ddc
|4 0
|6 621366_BOY
|7 0
|9 269577
|a PHY
|b PHY
|d 2010-02-02
|o 621.36/6 BOY
|p PHY009008
|r 2018-05-17
|w 2018-05-17
|y BK
|