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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
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| 格式: | Printed Book |
| 语言: | English |
| 出版: |
Berlin ;
Springer-Verlag,
c1987.
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| 丛编: | Springer series in materials science ;
v. 3. |
| 主题: |
| 实物描述: | viii, 320 p. : 77 ill. ; 24 cm. |
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| ISBN: | 0387179518 |