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Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Auteur principal: | |
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| Format: | Printed Book |
| Langue: | English |
| Publié: |
Berlin ;
Springer-Verlag,
c1987.
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| Collection: | Springer series in materials science ;
v. 3. |
| Sujets: |
| Description matérielle: | viii, 320 p. : 77 ill. ; 24 cm. |
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| ISBN: | 0387179518 |