Lanean...
Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
Berlin ;
Springer-Verlag,
c1987.
|
| Saila: | Springer series in materials science ;
v. 3. |
| Gaiak: |
| Deskribapen fisikoa: | viii, 320 p. : 77 ill. ; 24 cm. |
|---|---|
| ISBN: | 0387179518 |