Boyd, I. W. (1987). Laser processing of thin films and microstructures: Oxidation, deposition, and etching of insulators. Springer-Verlag.
Chicago Style citaatBoyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Berlin: Springer-Verlag, 1987.
MLA citatieBoyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Springer-Verlag, 1987.
Let op: Deze citaties zijn niet altijd 100% accuraat.