APA Zitierstil

Boyd, I. W. (1987). Laser processing of thin films and microstructures: Oxidation, deposition, and etching of insulators. Springer-Verlag.

Chicago Zitierstil

Boyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Berlin: Springer-Verlag, 1987.

MLA Zitierstil

Boyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Springer-Verlag, 1987.