Boyd, I. W. (1987). Laser processing of thin films and microstructures: Oxidation, deposition, and etching of insulators. Springer-Verlag.
Chicago-stil citatBoyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Berlin: Springer-Verlag, 1987.
MLA-referensBoyd, Ian W. Laser Processing of Thin Films and Microstructures: Oxidation, Deposition, and Etching of Insulators. Springer-Verlag, 1987.
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