Vacuum technology, thin films, and sputtering : an introduction /

Antzeko izenburuak

• Vacuum technology, thin films, and sputtering : an introduction /
  nork: Stuart, R. V.
  Argitaratua: (1983)
• Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
  nork: Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
  Argitaratua: (2012)
• Vacuum Technology , Thin Films , and Sputtering , an Introduction
  nork: Stuart , R. V
  Argitaratua: (1983)
• Sputtering materials for VLSI and thin film devices /
  nork: Sarkar, Jaydeep
• Vacuum, surfaces, thin films /
  Argitaratua: (1981)