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Vacuum technology, thin films, and sputtering : an introduction /
| Autor Principal: | |
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| Formato: | Printed Book |
| Idioma: | English |
| Publicado: |
New York :
Academic Press,
1983.
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| Subjects: |
| Descrición Física: | viii, 151 p. : ill. ; 24 cm. |
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| ISBN: | 0126747806 |