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Vacuum technology, thin films, and sputtering : an introduction /
| Egile nagusia: | |
|---|---|
| Formatua: | Printed Book |
| Hizkuntza: | English |
| Argitaratua: |
New York :
Academic Press,
1983.
|
| Gaiak: |
| Deskribapen fisikoa: | viii, 151 p. : ill. ; 24 cm. |
|---|---|
| ISBN: | 0126747806 |