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Handbook of thin film process technology /
| Altres autors: | Glocker, David A., Shah, S. Ismat, Westwood, William D. |
|---|---|
| Format: | Printed Book |
| Idioma: | English |
| Publicat: |
Bristol, UK ; Philadelphia :
Institute of Physics Pub.,
c1995.
|
| Matèries: |
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