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01141cam a2200205 a 4500 |
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20200810150400.0 |
| 008 |
950907s1995 enka bf 001 0 eng d |
| 082 |
0 |
0 |
|a 621.3815/2
|b GLO
|
| 245 |
0 |
0 |
|a Handbook of thin film process technology /
|c editors, David A. Glocker, S. Ismat Shah.
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| 300 |
|
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|a 1 v. (various pagings) :
|b ill. ;
|c 31 cm.
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| 653 |
|
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|a Thin film-Handbooks, manuals
|a Surface (Technology)-Handbooks, manuals
|
| 700 |
1 |
|
|a Glocker, David A.
|9 688
|
| 700 |
1 |
|
|a Shah, S. Ismat.
|9 689
|
| 700 |
1 |
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|a Westwood, William D.
|9 348
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| 942 |
|
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|c REF
|6 _
|
| 260 |
|
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|a Bristol, UK ;
|a Philadelphia :
|b Institute of Physics Pub.,
|c c1995.
|
| 500 |
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|a Accompanied by: [1]. 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 1 v. (various pagings) : ill. ; 30 cm. [Cataloged and bound separately] -- [2]. 98/2 Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) : ill. ; 31 cm. [Cataloged and bound separately].
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| 020 |
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|a 0750305282
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| 999 |
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|c 209732
|d 209732
|
| 952 |
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|0 0
|1 0
|2 ddc
|4 0
|6 62138152_GLO
|7 0
|9 267158
|a PHY
|b PHY
|d 2009-12-30
|o 621.3815/2 GLO
|p phy012058
|r 2009-12-30
|w 2009-12-30
|y REF
|