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Handbook of thin film process technology /
| Outros Autores: | , , |
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| Formato: | Printed Book |
| Idioma: | English |
| Publicado em: |
Bristol, UK ; Philadelphia :
Institute of Physics Pub.,
c1995.
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| Assuntos: |
| Descrição do item: | Accompanied by: [1]. 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 1 v. (various pagings) : ill. ; 30 cm. [Cataloged and bound separately] -- [2]. 98/2 Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) : ill. ; 31 cm. [Cataloged and bound separately]. |
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| Descrição Física: | 1 v. (various pagings) : ill. ; 31 cm. |
| ISBN: | 0750305282 |