Handbook of thin film process technology /

Podrobná bibliografie
Další autoři: Glocker, David A., Shah, S. Ismat, Westwood, William D.
Médium: Printed Book
Jazyk:English
Vydáno: Bristol, UK ; Philadelphia : Institute of Physics Pub., c1995.
Témata:
Thin film-Handbooks, manuals > Surface (Technology)-Handbooks, manuals
Popis
Popis jednotky:Accompanied by: [1]. 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 1 v. (various pagings) : ill. ; 30 cm. [Cataloged and bound separately] -- [2]. 98/2 Recipes for optical materials / editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) : ill. ; 31 cm. [Cataloged and bound separately].
Fyzický popis:1 v. (various pagings) : ill. ; 31 cm.
ISBN:0750305282

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