Glocker, D. A., Shah, S. I., & Westwood, W. D. (1995). Handbook of thin film process technology. Institute of Physics Pub..
Chicago Stili AlıntıGlocker, David A., S. Ismat Shah, ve William D. Westwood. Handbook of Thin Film Process Technology. Bristol, UK ; Philadelphia: Institute of Physics Pub., 1995.
MLA AlıntıGlocker, David A., et al. Handbook of Thin Film Process Technology. Institute of Physics Pub., 1995.
Uyarı: Bu alıntı herzaman %100 doğru olmayabilir..