APA Zitierstil

Glocker, D. A., Shah, S. I., & Westwood, W. D. (1995). Handbook of thin film process technology. Institute of Physics Pub..

Chicago Zitierstil

Glocker, David A., S. Ismat Shah, und William D. Westwood. Handbook of Thin Film Process Technology. Bristol, UK ; Philadelphia: Institute of Physics Pub., 1995.

MLA Zitierstil

Glocker, David A., et al. Handbook of Thin Film Process Technology. Institute of Physics Pub., 1995.