APA Edition Citation

Glocker, D. A., Shah, S. I., & Westwood, W. D. (1995). Handbook of thin film process technology. Institute of Physics Pub..

Chicago Edition Citation

Glocker, David A., S. Ismat Shah, and William D. Westwood. Handbook of Thin Film Process Technology. Bristol, UK ; Philadelphia: Institute of Physics Pub., 1995.

MLA Edition Citation

Glocker, David A., et al. Handbook of Thin Film Process Technology. Institute of Physics Pub., 1995.