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Microelectronic polymers

Detalhes bibliográficos
Autor principal:	Htoo, Maung S. (Author)
Formato:	Printed Book
Idioma:	English
Publicado em:	New York M. Dekker 1989.
Assuntos:	Polymers > Microlithography--Materials > Microelectronics--Materials. > Polymers-application > Microelectronics-materials > Polymers-application in microelectronics > Lithographic polymers

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