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00790cam a2200181 a 4500 |
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20200730134519.0 |
| 008 |
881012s1989 nyua b 001 0 eng |
| 082 |
0 |
0 |
|a 678.06:62
|b HTO
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| 100 |
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|a Htoo, Maung S.
|e Author
|9 828
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| 245 |
0 |
0 |
|a Microelectronic polymers
|c Maung S. Htoo.
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| 300 |
|
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|a ix, 407 p. :
|b ill. ;
|c 24 cm.
|
| 653 |
|
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|a Polymers
|a Microlithography--Materials
|a Microelectronics--Materials.
|a Polymers-application
|a Microelectronics-materials
|a Polymers-application in microelectronics
|a Lithographic polymers
|
| 700 |
1 |
|
|a Htoo, Maung S.,
|9 827
|
| 942 |
|
|
|c BK
|6 _
|
| 260 |
|
|
|a New York
|b M. Dekker
|c 1989.
|
| 020 |
|
|
|a 0824779908
|
| 999 |
|
|
|c 181860
|d 181860
|
| 952 |
|
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|0 0
|1 0
|2 ddc
|4 0
|6 6780662_HTO
|7 0
|9 234452
|a PSR
|b PSR
|d 2010-08-11
|l 1
|o 678.06:62 HTO
|p PS002440
|r 2018-09-17
|s 2018-09-05
|w 2010-08-11
|y BK
|