Microelectronic polymers

书目详细资料
主要作者: Htoo, Maung S. (Author)
格式: Printed Book
语言:English
出版: New York M. Dekker 1989.
主题:
Polymers > Microlithography--Materials > Microelectronics--Materials. > Polymers-application > Microelectronics-materials > Polymers-application in microelectronics > Lithographic polymers
实物特征
实物描述:ix, 407 p. : ill. ; 24 cm.
ISBN:0824779908

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