Microelectronic polymers

Bibliographic Details
Main Author: Htoo, Maung S. (Author)
Format: Printed Book
Language:English
Published: New York M. Dekker 1989.
Subjects:
Polymers > Microlithography--Materials > Microelectronics--Materials. > Polymers-application > Microelectronics-materials > Polymers-application in microelectronics > Lithographic polymers
Description
Physical Description:ix, 407 p. : ill. ; 24 cm.
ISBN:0824779908

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