Ehrlich, D., & Tsao, J. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.
Chicago Edition CitationEhrlich, Daniel, and Jeffrey Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Sandiego: Academic Press, 1989.
Deismireacht MLAEhrlich, Daniel, and Jeffrey Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.
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