Ehrlich, D., & Tsao, J. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.
Chicago Edition CitationEhrlich, Daniel, i Jeffrey Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Sandiego: Academic Press, 1989.
Cita MLAEhrlich, Daniel, i Jeffrey Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.
Atenció: Aquestes cites poden no estar 100% correctes.