APA Edition Citation

Ehrlich, D., & Tsao, J. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.

Chicago Edition Citation

Ehrlich, Daniel, and Jeffrey Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Sandiego: Academic Press, 1989.

MLA Edition Citation

Ehrlich, Daniel, and Jeffrey Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.

Warning: These citations may not always be 100% accurate.