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Defects control in semiconductors : proceedings of the conference on the science and technology of defect control in semiconductors, The Yokohama 21st century forum, Yokohama, Japan, Sept. 17-22: 1989

Dades bibliogràfiques
Autor principal:	Sumib, K. [ed.] (ed.by)
Autor corporatiu:	International conference on the science and technology of defect control in semiconductors
Format:	Printed Book
Idioma:	English
Publicat:	Amsterdam North-Holland 1990
Matèries:	Semiconductors - defect control

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