Defects control in semiconductors : proceedings of the conference on the science and technology of defect control in semiconductors, The Yokohama 21st century forum, Yokohama, Japan, Sept. 17-22: 1989

Bibliographische Detailangaben
1. Verfasser: Sumib, K. [ed.] (ed.by)
Körperschaft: International conference on the science and technology of defect control in semiconductors
Format: Printed Book
Sprache:English
Veröffentlicht: Amsterdam North-Holland 1990
Schlagworte:
Semiconductors - defect control

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Signatur: 621.382:620.1 SUM
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